film thickness uniformity meaning in English
膜厚均匀性
Examples
- Finite element method and matlab methods are used to simulate the film thickness uniformity . a rotating plane holder is discussed . the influencing parameters of film thickness uniformity , and the method of adjusting the parameters are studied
在分析均匀性的过程中，引入了有限元的思想，利用有限元法ansys和matlab相结合，模拟计算了旋转平面夹具的膜厚均匀性，分析了均匀性的影响因素，指出了工艺中的调整方法。